Fundamental Principles of Engineering Nanometrology
William Andrew 2009 | 352 Pages | ISBN: 0080964540 | PDF | 7 MB

The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up.

In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale.

Key topics covered include:
Basic metrological terminology, and the highly important topic of measurement uncertainty.
Instrumentation, including an introduction to the laser
Measurement of length using optical interferometry, including gauge block interferometry
Displacement measurement and sensors
Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation
Coordinate metrology
Low mass and force metrology